Equipment
| Tool | Manufacturer | Model | Description | Process | Vintage |
|---|---|---|---|---|---|
| PT_01 | Plasma-Therm | Versaline | Deposition PECVD / HDPCVD (3) Chamber | Deposition CVD | 2011 |
| UNACX3_03 | PlasmaTherm | Versaline | ICP Etcher (4) Chamber | ICP Etch | 2011 |
| ST_RM_01 | ST01 | Film Frame Expander | Film | ||
| ST_RM_02 | BET-PWE-R02 | Film Frame Expander | Film |
