Equipment ToolManufacturerModelDescriptionProcessVintage PT_01Plasma-ThermVersalineDeposition PECVD / HDPCVD (3) ChamberDeposition CVD2011 UNACX3_03PlasmaThermVersalineICP Etcher (4) ChamberICP Etch2011 ST_RM_01ST01Film Frame ExpanderFilm ST_RM_02BET-PWE-R02Film Frame ExpanderFilm