AMAT P5000 Mark II Ecther
- 1x Neslab HX 150
- 1x Heat Exchanger
- 3x RF Generator OEM 12A
- 1x mini controller
- 1x remote controller
- 1x mainframe with 29 slot elevator
- 3x process chamber MARK II with clamp 3x magnet driver, TP controllers, TP cables, light pen and monitor
- Type Etch, Process Trench and Taper
Quantity: 3 | Wafer Size: 6″ | Location: Rosnov, CZ
Notes: Recently de-installed from operating Fab