Equipment

ToolManufacturerModelDescriptionProcessVintage
ADWILL_1ADWILLRAD-2000/M12Semi-Automated UV Irradiation SystemTaper2006
ADWILL_2ADWILLRAD-2000F8Fully Semi-Automoated UV Irradiation SystemTaper2013
B207Santa Clara Plastics6 Inch WetbenchWet benchWet Etch
COAT_16DNSSK-80BW-BVPCoat/TrackCoat/develop1997
COAT_8DNSSKW-60A-BVPESpin/Expose/DevelopSpin/Expose/Develop1997
COGNEX_5CognexWafer ID ReaderOptical Inspect
EVG_ALIGN_02EVG620Automated Mask Alignment SystemPhotomask Align2008
EVG_BOND_01EVG850Automated Production Bonding SystemWafer Bonder
EVG_BOND_02EVG850Automated Production Bonding SystemWafer Bonder2012
EVG_DEBOND_01EVG850Automated Debonding SystemWafer DeBond
EVG_DEBOND_02EVG850Automated Debonding SystemWafer DeBond
EVG_SPRAY_01EVG150Automated Resist Processing SystemSpray Resist2005
JST_WE_01JST Manufacturing Inc.Linear Automated WetbenchWet Process
JST_WE_02JST Manufacturing Inc.Linear Automated WetbenchWet Process
KT_AIT_02KLA-TencorAIT8010Patterned Wafer Surface InspectionDefect Review1997
Lam Research 590_41Lam Research590Auto EtchDry Etch
LOG_BOND_01Logitech LTD1WBT5Wafer BonderWafer Bonder
MEI_WE_41MEIAdvancer Gemini Type AAdvancer Gemini Type AWet Etch2010
MEI_WE_42MEIAdvancer Gemini Type BAdvancer Gemini Type BWet Etch2011
PLANAR_1DNS6SCW-60A-AVPlanar Pulsar Chemical Resist/StripCoater1993
PLANAR_2DNS6SCW-60A-AVPlanar Pulsar Chemical Resist/StripCoater1993
SMT_PL_41Applied Materials/SemitoolLT210C 6-2Gold DeplaterGold Deplater2001
ST_RM_01ST01Film Frame ExpanderFilm
ST_RM_02BET-PWE-R02Film Frame ExpanderFilm
SUSS200_09SussGAMMACoat/Develop ClusterCoat/Develop
SVG_01_T1SVG8826/28/36Dual Coat/TrackCoat/Track
TAPER_01UltronUH108Wafer Backlapping Film ApplicatorTaper
TAPER_02UltronUH108Wafer Backlapping Film ApplicatorTaper
TAPER_03UltronUH108Wafer Backlapping Film ApplicatorTaper
TEM_EVP_41Temescal4400Evaporator Deposition SystemEmmitter Metal Evap2005
TEM_EVP_42Temescal4400Evaporator Deposition SystemEmmitter Metal Evap2005
TEM_EVP_43Temescal5700Evaporator Deposition SystemEmmitter Metal Evap2006
TEM_EVP_44Temescal5700Evaporator Deposition SystemEmmitter Metal Evap2006
TEM_EVP_46Temescal5700Evaporator Deposition SystemEmmitter Metal Evap2006
TK_TAPER_01TakatoriATM-1100GFully Automatic Wafer Protective Tape Lamination MachineTaper2011
UNA702_01PlasmaThermVersalockICP Etcher (2) ChamberICP Etch2000
UNACX3_02PlasmaThermVersalineICP Etcher (1) ChamberICP Etch2008
UNACX3_03PlasmaThermVersalineICP Etcher (4) ChamberICP Etch2011
WS_01KeithleyS500Test SystemTester2011
WS_02KeithleyS500Test SystemTester2013
WS_03KeithleyS500Test SystemTester2013
WS_04KeithleyS500Test SystemTester2014
WS_05KeithleyS500Test SystemTester2014
WS_201CredenceD10LTX/Credence Diamond D10 TesterTester2014
WS_202CredenceD10LTX/Credence Diamond D10 TesterTester2015
SMT_SAT_41Applied/Materials/SemitoolSAT 211PhotoresistGold Acid Spray Etch 2003
SMT_DP_41Applied Materials/SemitoolLT-210C 2-2-1Gold DeplaterGold Deplater
YES_05Yield Engineering Systems58TAYES Vacuum OvenPhoto Oven
SMT_PL_48Applied Materials/SemitoolRaider ECD210 / R310PD23SRD6CFD06AY03Electroplating Deposition Electroplater
SMT_PL_49Applied Materials/SemitoolRaider ECD204 / RE14O3ECD0603Electroplating DepositionElectroplater
PT_01Plasma-ThermVersalineDeposition PECVD / HDPCVD (3) ChamberDeposition CVD2011
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