Matrix 105 CD System One Plasma Asher
- Configured for 6″ wafers
- capable of 2″ to 6″
- alluminum heated wafer chuck
- 35 WPH on 6″ substrates
- 0.1 particles added per cm2
- pick and place wafer handling
- automatic endpoint detection
- single wafer
- single cassette
Quantity: 18 | Wafer Size: 6″ | Location: Rosnov, CZ
Notes: Recently de-installed from operating Fab