Matrix 105 CD System One Plasma Asher

• Configured for 6″ wafers
• capable of 2″ to 6″
• alluminum heated wafer chuck
• 35 WPH on 6″ substrates
• 0.1 particles added per cm2
• pick and place wafer handling
• automatic endpoint detection
• single wafer
• single cassette

Quantity: 18 | Wafer Size: 6″ | Location: Rosnov, CZ

Notes: Recently de-installed from operating Fab